Simultaneous determination of indium and nitrogen contents of InGaAsN quantum wells by optical in situ monitoring
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Comparison of H2 and N2 as carrier gas in MOVPE growth of InGaAsN quantum wells
Differences in sample quality and nitrogen incorporation in InGaAsN quantum well samples grown by metal-organic vapor phase epitaxy using either H2 or N2 as the carrier gas are studied by several ex situ methods. The nitrogen incorporation increases while the indium content and the growth rate of the quantum wells decrease when using N2 as the carrier gas instead of H2. Also, the hydrogen incor...
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In this article, we report an attempt of extending the InGaAsN materials towards 1.3μm and 1.55μm wavelength. All these InGaAsN samples are grown in a plasma-assisted solid-source molecular-beam epitaxy (SSMBE) system. Our experiments revealed that the nitrides could be grown with both direct nitrogen beam and dispersive nitrogen. The nitrogen incorporation rate could be reduced by the presen...
متن کاملTitle: In situ determination of nitrogen content in InGaAsN quantum wells
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